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真空室體 Vacuum chamber |
Ø1300*1450mm,SUS304材質(zhì) φ1,300*1,450mm,SUS304 material |
排氣系統(tǒng) Air exhaust system |
KT-500擴(kuò)散泵2臺,總排氣速率(加載水冷阱)11,000Pa.L/S Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S; |
極限真空≤2.0E-4Pa;排氣時間≤15min(大氣→4.0E-3Pa) Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa) |
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基片架 Substrate holder |
Ø1200四葉扇形基片架, 3~30rpm轉(zhuǎn)速;可選配行星基片架、翻轉(zhuǎn)機(jī)構(gòu)等 φ1200 four-blade sector-shaped substrate holder, rotating speed 3~30rpm; a planet substrate holder or a turnover mechanism can also be matched; |
加熱機(jī)構(gòu) Heating means |
******350℃,PID控制;恒溫20min后溫度均勻性250±10℃ Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control; |
石英監(jiān)控儀 Quartz monitor |
進(jìn)口石英晶體膜厚監(jiān)控儀;2點(diǎn)(或6點(diǎn))晶振探頭 Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe; |
電子束蒸發(fā)源 Electron beam evaporation source |
10KW電子槍 2臺,12點(diǎn)坩堝和環(huán)形坩堝 Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible; |
電阻蒸發(fā)源 Resistance evaporation source |
功率4KW(一對、兩對或多對) Power of 4KW (one pair, two pairs or more pairs) |
膜厚修正板 Film depth correction board |
2個自動可倒式膜厚修正機(jī)構(gòu) Two automatic film depth correction mechanisms of collapsible type |
反應(yīng)氣體 Reaction gas |
APC自動壓強(qiáng)控制儀,質(zhì)量流量計(jì) APC automatic pressure controller, mass flowmeter |
離子源 Ion source |
可選配Kafman、Holl或RF離子源 Available for matching of Kafman, Holl or RF ion source |
低溫抽氣裝置 Low temperature evacuating equipment |
進(jìn)口低溫抽氣裝置有效捕集水蒸汽,******溫度-130℃ The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃ |
RCS系統(tǒng) RCS system |
基于WINDOWS的全自動鍍膜軟件 Windows-based full automatic coating software |
控制系統(tǒng) Control system |
控制柜(液晶觸摸式彩色顯示器),遠(yuǎn)程控制遙控盒 Control cabinet (with liquid crystal color touch screen), remote-control box for remote control |
消耗能源 Energy consumption |
3相,220/380VAC,50Hz;~70KVA Three-phase, 220/380VAC,50Hz;~70KVA |
水流量140L/min,壓力0.3~0.5MPa Water flow 140L/min, pressure 0.3~0.5MPa |
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壓縮空氣0.5MPa~0.7MPa Compressed air 0.5MPa~0.7MPa |
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重 量 Weight |
凈重約4500Kg Net weight about 4,500 Kg |
安裝空間 Installation space |
W4000mmxD6000mmxH2700mm W4,000mm×D6,000mm×H2,700mm |
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